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型號
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V-1000
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V-1000X（雙工作臺）
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V-1000XS
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等離子工作模式
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RIE and DP
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主件
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電極結構
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平行平板式
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平臺尺寸
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280mmW×280mmD
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300mmW×300mmD(Double stage)
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400mmW×375mmD
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工作室尺寸
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400mmW×400mmD×380mmH
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400mmW×400mmD×380mmH
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600mmW×554mmD×440mmH
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真空測量
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電容壓力計
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反應氣體系統(tǒng)
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雙系統(tǒng)
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控制器
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Programmable controller
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顯示屏
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Programmable terminal (touch panel)
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射頻能量供應
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輸入
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AC 200/220/380V,Three phase,
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高頻輸出功率
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1,000W
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1,000 & 1,500W
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發(fā)振器
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水晶發(fā)振
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發(fā)振頻率
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13.56 MHz
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匹配調(diào)節(jié)
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自動調(diào)整
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真空泵 (Vacuum Pump)
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Displacement （置換量）
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670 & 1,000 liters/min.
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670 & 1,500 liters/min.
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1,000 & 1,500 liters/min.
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Inlet configuration(進口配置)
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NW40 with a flexible stainless steel hose (1 meter long)
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Outlet configuration（出口配置）
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NW40
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氣體系統(tǒng)（Gas Systems）
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Purge gas（凈化氣體）
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Nitrogen (N2) and a regulator (3 kgf/cm2) with a manometer
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Driving gas（推進氣體）
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Air or nitrogen (N2) and a regulator (alarm contact at 10 kgf/cm2) with a manometer
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Reaction gas G1（反應氣體1）
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Oxygen (O2) and a mass flow controller (1000 secm)
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Reaction gas G2（反應氣體2）
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Argon (Ar) and a mass flow controller (100 secm)
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Safety Mechanisms（**機構）
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System Protections（系統(tǒng)保護）
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*Oscillator protection circuit *Front-door interlock switch (interlocked with the startup)
*Safety switches (interlock switch on the side panels) *Vacuum leak test function
*Air-purge end buzzer *Alarm buzzer *Emergency stop push-button switch
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Actions against a trouble of the vacuum pump（真空泵故障反應）
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The plasma scrubber takes the counteractions listed below and show an Alarm message on its display when something wrong happens on the vacuum pump.
*The main valve closes *The gas feed valve closes *The isolation valve closes
*The oscillator stops outputting *Treatment process is suspended *The Alarm buzzer starts sounding
* The alarm indicator lamp lights up to notify the trouble of the vacuum pump
*The treatment process timer stops
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REQUIRED UTILITIES（必要的配套設施）
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Power Supply（電源供應）
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Main unit with vacuum pump
（配真空泵主機）
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Three phases, AC220V, 30 A, 60Hz (with an accessory power cable of 3 meters long, and exposed crimp-style terminals of 8 millimeters long)
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Gases（氣體）
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Driving gas （推進氣體）
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Air or nitrogen (N2) (Feed pressure: 5～7 kgf/cm2)
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Purge gas（凈化氣體）
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Nitrogen (N2) (Feed pressure: 2～7 kgf/cm2)
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Reaction gas G1（反應氣體1）
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Oxygen (O2) (Feed pressure: 1.5 kgf/cm2)
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Reaction gas G2（反應氣體2）
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Argon (Ar) (Feed pressure: 1.5 kgf/cm2)
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Connection port（連接端口）
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1/4" swagelok joint bulkhead union (SS-400-61)
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Note: Pressure regulators, filters and other protective devices shall be prepared by others.
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Connection Diameter of the Discharge Duct (and inlet Port)（ 流注輸送管口徑）
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Vacuum pump's inlet port
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NW4O (with a flexible stainless steel hose of 1 meter long)
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Vacuum pump's outlet port
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NW4O
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Main unit's ozone outlet port
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163mm diameter
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Oscillator's ventilation port
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163mm diameter
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Note: Every port has a connector designed for a flexible hose. Connect a duct to these inlet and outlet ports.
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